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Analysis of parameters of multilayer carbon interference structures in the soft x‐ray range

 

作者: P. E. Kondrashov,   I. S. Smirnov,   E. G. Novoselova,   A. M. Baranov,  

 

期刊: Applied Physics Letters  (AIP Available online 1996)
卷期: Volume 69, issue 3  

页码: 305-307

 

ISSN:0003-6951

 

年代: 1996

 

DOI:10.1063/1.118041

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A new type of x‐ray interference mirrors using hydrogenated carbon films of various densities is described. The reflection coefficient and resolution of multilayer carbon structures obtained in the soft x‐ray range (1.54–44.7 A˚) are investigated experimentally and theoretically. As is shown, hydrogenated carbon films can be used to create mirrors with high resolution. ©1996 American Institute of Physics.

 

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