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Re‐evaporation effects and optical properties of molecular‐beam‐epitaxial AlGaAs/GaAs/AlGaAs wells

 

作者: Colin E. C. Wood,   Saeyed A. Tabatabaei,   Peter Sheldon,  

 

期刊: Journal of Applied Physics  (AIP Available online 1993)
卷期: Volume 74, issue 3  

页码: 1697-1699

 

ISSN:0021-8979

 

年代: 1993

 

DOI:10.1063/1.354823

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Elemental materials that condense on surfaces near effusion cells can be reevaporated toward substrates when heated by radiation from effusion furnaces. There they accumulate as unwanted impurities at interfaces and distribute throughout epitaxial films during growth. This effect is greatly increased when shutters are closed. Re‐evaporated aluminum is shown to degrade minority‐carrier properties of Al0.3Ga0.7As/GaAs double heterostructures. Modified temperature schedules and hardware to reduce re‐evaporation effects are suggested.

 

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