Re‐evaporation effects and optical properties of molecular‐beam‐epitaxial AlGaAs/GaAs/AlGaAs wells
作者:
Colin E. C. Wood,
Saeyed A. Tabatabaei,
Peter Sheldon,
期刊:
Journal of Applied Physics
(AIP Available online 1993)
卷期:
Volume 74,
issue 3
页码: 1697-1699
ISSN:0021-8979
年代: 1993
DOI:10.1063/1.354823
出版商: AIP
数据来源: AIP
摘要:
Elemental materials that condense on surfaces near effusion cells can be reevaporated toward substrates when heated by radiation from effusion furnaces. There they accumulate as unwanted impurities at interfaces and distribute throughout epitaxial films during growth. This effect is greatly increased when shutters are closed. Re‐evaporated aluminum is shown to degrade minority‐carrier properties of Al0.3Ga0.7As/GaAs double heterostructures. Modified temperature schedules and hardware to reduce re‐evaporation effects are suggested.
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