Proximity effect correction for electron beam lithography by equalization of background dose
作者:
Geraint Owen,
Paul Rissman,
期刊:
Journal of Applied Physics
(AIP Available online 1983)
卷期:
Volume 54,
issue 6
页码: 3573-3581
ISSN:0021-8979
年代: 1983
DOI:10.1063/1.332426
出版商: AIP
数据来源: AIP
摘要:
Compensation for the proximity effect in electron lithography can be achieved by equalization of the backscattered dose received by all pattern points. This is accomplished by exposing the reverse tone of the required pattern with a beam diameterdc=2&sgr;b×(1+&eegr;e)−1/4and doseQc=Qe×[&eegr;e/(1+&eegr;e)], where &sgr;bis the radius of the Gaussian spatial distribution function of backscattered electrons at normally exposed pixels, &eegr;eis the ratio of backscattered to forwardscattered energy, andQeis the dose delivered to normally exposed pixels. This correction method has been confirmed to work for 500‐nm features by computer simulation of electron beam exposure and development and by experiment on a raster scan electron beam lithography system.
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