Carbon filament source forp‐type doping in molecular beam epitaxy

 

作者: A. Mak,   S. R. Johnson,   C. Lavoie,   J. Mackenzie,   M. K. Nissen,   D. Rogers,   T. Tiedje,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  （AIP Available online 1994）
卷期: Volume 12, issue 3  

页码: 1407-1409

 

ISSN:1071-1023

 

年代: 1994

 

DOI:10.1116/1.587307

 

出版商: American Vacuum Society

 

关键词: MOLECULAR BEAM EPITAXY;CARBON FIBERS;FILAMENTS;CRYSTAL DOPING;GALLIUM ARSENIDES;BINARY COMPOUNDS;CARBON ADDITIONS;THIN FILMS;EVAPORATION;GaAs:C;(Al,Ga)As:C

 

数据来源: AIP

 

摘要:

 

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