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Film thickness and grain size diameter dependence on temperature coefficient of resistance of thin metal films

 

作者: Awatar Singh,  

 

期刊: Journal of Applied Physics  (AIP Available online 1974)
卷期: Volume 45, issue 4  

页码: 1908-1909

 

ISSN:0021-8979

 

年代: 1974

 

DOI:10.1063/1.1663515

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The combined effect of film thickness and grain size diameter on the temperature coefficient of resistance of a uniform continuous polycrystalline metal film of thickness greater than the intrinsic mean free path has been theoretically investigated. It has been found that the value of the temperature coefficient of resistance decreases with decrease in grain size. For very small grain size it is less than the bulk value and may be negative in some cases, whereas for very large grain size and film thickness it approaches the bulk value.

 

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