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A new method to detect energy‐band bending using x‐ray photoemission spectroscopy

 

作者: T. Ogama,  

 

期刊: Journal of Applied Physics  (AIP Available online 1988)
卷期: Volume 64, issue 2  

页码: 753-757

 

ISSN:0021-8979

 

年代: 1988

 

DOI:10.1063/1.341919

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A new method to detect energy‐band bending using x‐ray photoemission spectroscopy has been proposed which measures the changes in the binding energy with the change in the detection angle of photoelectrons. This method was applied to crystalline silicon of various doping conditions with a thin surface oxide and after removing it by ion sputtering. The change in the binding energy with the change in the detection angle was observed only in heavily dopedp‐type silicon before sputtering, but not in other silicon specimens studied in this work. All specimens showed an identical binding energy independent of the detection angle after removing surface oxides by sputtering. These results are explained semiquantitatively using a simple band‐bending model.

 

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