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Model of collisional sheath evolution in plasma source ion implantation

 

作者: Dezhen Wang,   Tengcai Ma,   Xinlu Deng,  

 

期刊: Journal of Applied Physics  (AIP Available online 1993)
卷期: Volume 74, issue 4  

页码: 2986-2988

 

ISSN:0021-8979

 

年代: 1993

 

DOI:10.1063/1.354612

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A model is developed to study the temporal evolution of the sheath during a pulse of high negative voltage applied to a target immersed in a plasma, such as that present in plasma source ion implantation. This model covers the whole range from collision free to collision dominated sheaths. The sheath expansion velocity and the position of the sheath edge as a function of time in planar geometries for various pressures are obtained.

 

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