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Structure, mechanical and tribological properties of Ti–B–N and Ti–Al–B–N multiphase thin films produced by electron-beam evaporation

 

作者: C. Rebholz,   H. Ziegele,   A. Leyland,   A. Matthews,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  (AIP Available online 1998)
卷期: Volume 16, issue 5  

页码: 2851-2857

 

ISSN:0734-2101

 

年代: 1998

 

DOI:10.1116/1.581431

 

出版商: American Vacuum Society

 

关键词: (Ti,Al,B,N)

 

数据来源: AIP

 

摘要:

Titanium-based multiphase ceramic coatings were deposited by electron-beam plasma-assisted physical vapor deposition, evaporating mixtures of Ti,TiB2,and(Ti0.6Al0.4)B2.19N1.47material in Ar orAr/N2plasmas. All exhibited dense microstructures, however varying amounts of droplets or spits incorporated in the coatings produced could be observed for the different evaporation materials depending on their fabrication route. Results on the chemical composition of the coatings, obtained from glow discharge optical emission spectroscopy and Auger electron spectroscopy, showed no preferential evaporation of any element from the different evaporation source materials used, resulting in very similar compositions between evaporant and coating. Hardness values of up to 40 GPa were found for Ti–B–N based coatings containing bothTiB2andc-BNphases. Lower hardness values of around 30 GPa were observed for coatings deposited within the quaternary Ti–Al–B–N system, due to the presence ofh-BN.Two micron thick Ti–Al–B–N coatings showed only minimal wear in pin-on-disk sliding wear tests against cemented tungsten carbide balls and, with increasingh-BNcontent, a slight decrease in “stick–slip” oscillation and friction coefficient. In contrast to Ti–Al–B–N coatings (whose impact adhesion was relatively poor) Ti–B–N coatings approximately 1.5 μm thick showed no coating spallation in impact tests against cemented tungsten carbide balls and consequently superior impact wear resistance.

 

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