Influence of nanoscale surface curvature on prenucleation phenomena in chemical vapor deposition diamond growth
作者:
O. A. Louchev,
Y. Sato,
P. A. Dennig,
期刊:
Applied Physics Letters
(AIP Available online 1997)
卷期:
Volume 71,
issue 7
页码: 894-896
ISSN:0003-6951
年代: 1997
DOI:10.1063/1.119680
出版商: AIP
数据来源: AIP
摘要:
The problem of adsorption desorption of methyl radicals on a surface with nanoscale curvature is numerically studied for typical chemical vapor deposition diamond growth conditions. Surface profiles with concave nanoscale curvature lead to an increase in the energy of adsorption, which can enhance the nucleation of the new phase on the substrates. Moreover, the nanoscale curvature is even able to provoke a nucleation of the new phase on substrates which do not have an affinity for nucleation. ©1997 American Institute of Physics.
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