Inexpensive and Sensitive Laser-Beam Aligner for Use during Film Evaporation
作者:
J. H. Bloom,
F. D. Shepherd,
期刊:
Journal of Vacuum Science and Technology
(AIP Available online 1970)
卷期:
Volume 7,
issue 4
页码: 495-496
ISSN:0022-5355
年代: 1970
DOI:10.1116/1.1315375
出版商: American Vacuum Society
数据来源: AIP
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