AbstractStudy of heterogeneous catalysts by modern surface analysis methods. The past decade has been one of tempestuous development in methods of surface analysis as a result of significant improvements of vacuum techniques and electronic components. The principal methods available for studying the chemical composition of catalysts are ESCA, Auger spectroscopy, ISS (ion scattering spectroscopy), and SIMS (secondary ion mass spectrometry). The “classical scanning microscope” and various “micro‐range” analyzers, e. g. the scanning Auger microscope, permit elucidation of catalyst surface structures. Advantages and drawbacks of the various methods are presented with the aid of selected examples and the limits of the analysis of industrial catalysts are