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Fast, low insertion-loss optical switch using lithographically defined electromagnetic microactuators and polymeric passive alignment structures

 

作者: R. A. Norwood,   J. Holman,   L. W. Shacklette,   S. Emo,   N. Tabatabaie,   H. Guckel,  

 

期刊: Applied Physics Letters  （AIP Available online 1998）
卷期: Volume 73, issue 22  

页码: 3187-3189

 

ISSN:0003-6951

 

年代: 1998

 

DOI:10.1063/1.122713

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A micro-optoelectromechanical switch that combines microactuator technology developed via the Lithographie Galvanformung Abformung process with lithographically defined polymeric alignment elements is described. The multimode optical switch achieves submillisecond switching times, low insertion loss (<1 dB), low cross talk (<70 dB), low voltage (3 V), and wavelength independence. ©1998 American Institute of Physics.

 

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