AbstractDepth distributions of X‐ray production by electrons in the energy range of six to fifteen key have been measured for Si and Cu characteristic X‐rays in matrices of Al, Ni, Ag and Au. Corrections from these curves show that the modified Philibert absorption correction predicts the wrong dependence on matrix atomic number at these low electron energies, while the Duncomb and Reed atomic number correction shows too strong a dependence on atomic number. The curves should be valuable for comparison with both theoretical and empirical models for quantitative analysis at low energ