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Calculated elastic constants for stress problems associated with semiconductor devices

 

作者: W. A. Brantley,  

 

期刊: Journal of Applied Physics  (AIP Available online 1973)
卷期: Volume 44, issue 1  

页码: 534-535

 

ISSN:0021-8979

 

年代: 1973

 

DOI:10.1063/1.1661935

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Theoretical estimates or experimental determinations of stress fields associated with semiconductor devices are generally simplified with the aid of two elastic constants, Young's modulusEand Poisson's ratio &ngr;. In this paper, a generalized expression for &ngr; has been derived for arbitrary orientations of cubic semiconductor crystals, and the variation ofE, &ngr;, andE/(1‐&ngr;) for directions within the important {111}, {100}, and {110} planes is examined. The results show that isotropic elasticity theory is exact for all directions within {111} planes and that the composite elastic constantE/(1‐&ngr;) which frequently occurs in problems of practical interest is also invariant for all directions within {100} planes. Numerical values for the various elastic constants are tabulated for GaAs, GaP, Si, and Ge.

 

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