Low series resistance vertical‐cavity front‐surface‐emitting laser diode
作者:
Hoi‐Jun Yoo,
J. R. Hayes,
N. Andreadakis,
E. G. Paek,
G. K. Chang,
J. P. Harbison,
L. T. Florez,
Young‐Se Kwon,
期刊:
Applied Physics Letters
(AIP Available online 1990)
卷期:
Volume 56,
issue 20
页码: 1942-1944
ISSN:0003-6951
年代: 1990
DOI:10.1063/1.103029
出版商: AIP
数据来源: AIP
摘要:
We have fabricated a front‐surface‐emitting laser diode (FSELD) using a technique which relies on a double ion implant of oxygen and beryllium. The laser had a low operating voltage at the lasing threshold, a low series resistance, and a relatively small threshold current of 6 mA for a 25‐&mgr;m‐diam device. The lasing wavelength was 971 nm and the spectral width above threshold was 5 A˚. Since the light comes from the front surface of the wafer, the fabrication technique described here for realizing a FSELD can be used for the fabrication of vertical‐cavity visible surface‐emitting lasers.
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