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Low series resistance vertical‐cavity front‐surface‐emitting laser diode

 

作者: Hoi‐Jun Yoo,   J. R. Hayes,   N. Andreadakis,   E. G. Paek,   G. K. Chang,   J. P. Harbison,   L. T. Florez,   Young‐Se Kwon,  

 

期刊: Applied Physics Letters  (AIP Available online 1990)
卷期: Volume 56, issue 20  

页码: 1942-1944

 

ISSN:0003-6951

 

年代: 1990

 

DOI:10.1063/1.103029

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We have fabricated a front‐surface‐emitting laser diode (FSELD) using a technique which relies on a double ion implant of oxygen and beryllium. The laser had a low operating voltage at the lasing threshold, a low series resistance, and a relatively small threshold current of 6 mA for a 25‐&mgr;m‐diam device. The lasing wavelength was 971 nm and the spectral width above threshold was 5 A˚. Since the light comes from the front surface of the wafer, the fabrication technique described here for realizing a FSELD can be used for the fabrication of vertical‐cavity visible surface‐emitting lasers.

 

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