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Flow visualization in low pressure chambers using laser‐induced biacetyl phosphorescence

 

作者: Fumikazu Itoh,   George Kychakoff,   Ronald K. Hanson,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  （AIP Available online 1985）
卷期: Volume 3, issue 6  

页码: 1600-1603

 

ISSN:0734-211X

 

年代: 1985

 

DOI:10.1116/1.582946

 

出版商: American Vacuum Society

 

关键词: VELOCITY DISTRIBUTION;GAS FLOW;CHEMICAL VAPOR DEPOSITION;LASER RADIATION;PHOSPHORESCENCE;ORGANIC COMPOUNDS;MEDIUM VACUUM;EPITAXY;OPTICAL PROPERTIES;MEASURING METHODS

 

数据来源: AIP

 

摘要:

Two optical probes, utilizing laser‐induced biacetyl phosphorescence recorded by an image‐intensified solid state camera, have been developed and used to characterize velocity fields in a low pressure chamber (similar to a plasma‐enhanced CVD reactor). The method has been demonstrated at pressures as low as 0.5 Torr; measurements at lower pressures should be possible. Reactor flow velocity fields influence gas residence times and deposition rates. The method discussed in this paper can be used to investigate these effects.

 

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