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Pressure measurement system for beam experiments in the range 0.5–10−2Pa

 

作者: M. T. Elforda),   R. Hegerbergb),  

 

期刊: Journal of Vacuum Science and Technology  （AIP Available online 1979）
卷期: Volume 16, issue 3  

页码: 955-959

 

ISSN:0022-5355

 

年代: 1979

 

DOI:10.1116/1.570120

 

出版商: American Vacuum Society

 

关键词: PRESSURE MEASUREMENT;MEDIUM VACUUM;HIGH VACUUM;PRESSURE GAGES;CAPACITORS;SCATTERING;ATOMIC BEAMS;CALIBRATION;EXPANSION CHAMBERS;KNUDSEN FLOW;ADSORPTION;DESORPTION

 

数据来源: AIP

 

摘要:

A system for measurements of gas pressure in the range 0.5–10−2Pa is described. A known pressure is produced by static gas expansion and compared with the pressure in a scattering cell using a capacitance manometer as the null detector. The pressure in the scattering cell is controlled by a separate dynamic expansion system. Sources of error are discussed and the absolute error is estimated to be 0.4% at 0.5 Pa, 0.5% at 0.1 Pa, and 2.3% at 10−2Pa.

 

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