Properties of Cu film under XeCl excimer laser irradiation
作者:
Shi‐Qing Wang,
Edith Ong,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1992)
卷期:
Volume 10,
issue 1
页码: 149-159
ISSN:1071-1023
年代: 1992
DOI:10.1116/1.586289
出版商: American Vacuum Society
关键词: COPPER;EXCIMER LASERS;XENON CHLORIDES;PHYSICAL RADIATION EFFECTS;LASER RADIATION;GRAIN SIZE;ELECTRIC CONDUCTIVITY;RECRYSTALLIZATION;THIN FILMS;ORIENTATION;SPUTTERED MATERIALS;REFLECTIVITY;Cu
数据来源: AIP
摘要:
Sputter deposited Cu films on top of a substrate were melted and recrystallized by irradiating under a XeCl (308 nm) excimer laser with a 45 ns pulse duration at substrate temperatures of 20, 365, and 440 °C. The properties of the irradiated film, such as sheet resistance, reflectance, grain size, stress, and preferred orientation were characterized as a function of the laser fluence at each of temperatures. The results show a decrease in sheet resistance and specular reflectance, and an increase in grain size after laser irradiation. The net stress of the film stack changes from compressive to tensile with substrate heating and laser irradiation and the polycrystalline orientation of the Cu films changes from (111) for the as‐deposited sample to (110) after laser irradiation. The significance of these results is discussed.
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