Degradation studies of proton‐implanted vertical cavity surface emitting lasers
作者:
Y. Michael Cheng,
Robert W. Herrick,
Pierre M. Petroff,
Mary K. Hibbs‐Brenner,
Robert A. Morgan,
期刊:
Applied Physics Letters
(AIP Available online 1995)
卷期:
Volume 67,
issue 12
页码: 1648-1650
ISSN:0003-6951
年代: 1995
DOI:10.1063/1.115044
出版商: AIP
数据来源: AIP
摘要:
We analyze the degradation process of proton‐implanted, top‐emitting vertical cavity surface emitting lasers using cross‐sectional cathodoluminescence. The spatially resolved luminescence characteristics of the active regions, andp‐ andn‐distributed Bragg reflector (DBR) mirrors before and after degradation of the devices are presented. Degradation has been observed not only in the active regions, but also remarkably in thep‐DBR mirror stacks. We show that a significant minority carrier population is present in thepmirror under normal operating conditions to drive the degradation observed in thepmirror. ©1995 American Institute of Physics.
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