Multiple Cathode Sputtering System
作者:
John G. Simmons,
Leon I. Maissel,
期刊:
Review of Scientific Instruments
(AIP Available online 1961)
卷期:
Volume 32,
issue 6
页码: 642-645
ISSN:0034-6748
年代: 1961
DOI:10.1063/1.1717459
出版商: AIP
数据来源: AIP
摘要:
The study of thin metal films, used as passive components in microelectronic circuitry, led to the development of a multiple cathode sputtering system. The major advantage of a sputtering system is that highly refractory materials can be sputtered quite readily, but they cannot be evaporated without elaborate equipment. Thus, a sputtering system permits studies of thin metal films to be extended from those with low melting points into the range of metals with high melting points. This paper describes a versatile sputtering system which incorporates several cathodes and a rotating anode, making it possible to sputter one metal after another without breaking the vacuum and to deposit films of various thicknesses under identical conditions.
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