Experimental determinations of electron stopping power at low energies
作者:
Suicho Luo,
Xiao Zhang,
DavidC. Joy,
期刊:
Radiation Effects and Defects in Solids
(Taylor Available online 1991)
卷期:
Volume 117,
issue 1-3
页码: 235-242
ISSN:1042-0150
年代: 1991
DOI:10.1080/10420159108220619
出版商: Taylor & Francis Group
关键词: stopping power;oscillator strength;EELS;Bethe law;Monte Carlo simulations
数据来源: Taylor
摘要:
An accurate knowledge of electron stopping power is important for calculations and simulations of electron beam interactions with solids especially in the low energy region (< 10 keV). This paper describes a simplified and rapid experimental procedure using based on electron energy loss spectroscopy which permits accurate stopping power determinations to be made from any material which can be observed in a transmission electron microscope. It is demonstrated that the stopping power and oscillator strength data so generated is in good agreement with other measurements and theoretical predictions. The technique is now being applied to a wide variety of materials of semiconductor interest.
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