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Ion scattering spectrometry in a commercial scanning Auger microprobe

 

作者: Zhixiong Liu,   David A. Reed,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1984)
卷期: Volume 55, issue 4  

页码: 542-546

 

ISSN:0034-6748

 

年代: 1984

 

DOI:10.1063/1.1137788

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A scanning Auger microprobe (SAM) equipped with a cylindrical mirror analyzer and noncoaxial ion gun has been adapted for ion scattering spectrometry (ISS). An optimally designed movable entrance aperture limits the scattering angle, providing high mass resolution and good sensitivity. Much of the electronics of the original SAM is employed for ISS, and switching the mode of operation is easily accomplished. The critical part of the apparatus is the entrance aperture, and its design is discussed in detail.

 

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