Ion scattering spectrometry in a commercial scanning Auger microprobe
作者:
Zhixiong Liu,
David A. Reed,
期刊:
Review of Scientific Instruments
(AIP Available online 1984)
卷期:
Volume 55,
issue 4
页码: 542-546
ISSN:0034-6748
年代: 1984
DOI:10.1063/1.1137788
出版商: AIP
数据来源: AIP
摘要:
A scanning Auger microprobe (SAM) equipped with a cylindrical mirror analyzer and noncoaxial ion gun has been adapted for ion scattering spectrometry (ISS). An optimally designed movable entrance aperture limits the scattering angle, providing high mass resolution and good sensitivity. Much of the electronics of the original SAM is employed for ISS, and switching the mode of operation is easily accomplished. The critical part of the apparatus is the entrance aperture, and its design is discussed in detail.
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