CH3detection in a low-density supersonic arcjet plasma during diamond synthesis
作者:
Michael H. Loh,
Mark A. Cappelli,
期刊:
Applied Physics Letters
(AIP Available online 1997)
卷期:
Volume 70,
issue 8
页码: 1052-1054
ISSN:0003-6951
年代: 1997
DOI:10.1063/1.118439
出版商: AIP
数据来源: AIP
摘要:
We report on the measurement of methyl radical(CH3)densities in a low-density supersonic arcjet plasma used in the synthesis of diamond films. Single-pass, high-sensitivity ultraviolet (UV) absorption spectroscopy has been employed to study theX(2A2″)→B(2A1′)transition of the methyl radical near 216 nm. The minimum detectableCH3density is found to be∼4×1013 cm−3, which corresponds to a fractional absorption of2×10−3at a gas temperature of 1200 K. The dependence of the measured methyl column density on pressure andCH4/H2flow ratio has been studied. The results are used to revise our previous estimates of the reactive “sticking” coefficient forCH3, and we now find that it is of order10−2under conditions where we have previously documented the growth of high quality diamond films. ©1997 American Institute of Physics.
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