Mass Spectrometric Sampling Probe for Discharge Plasmas
作者:
D. K. Bo¨hme,
J. M. Goodings,
期刊:
Review of Scientific Instruments
(AIP Available online 1966)
卷期:
Volume 37,
issue 3
页码: 362-366
ISSN:0034-6748
年代: 1966
DOI:10.1063/1.1720180
出版商: AIP
数据来源: AIP
摘要:
A versatile sampling technique is described which permits a more definitive study of ion extraction and plasma sheath formation in discharge plasmas. The ionic species from the plasma are sampled into a quadrupole mass spectrometer through a metal leak arrangement which itself acts as a probe. This behavior is substantiated by sampling probe characteristics, and charge density and electron temperature determinations for a flowing microwave discharge plasma in nitrogen at low pressure.
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