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Mass Spectrometric Sampling Probe for Discharge Plasmas

 

作者: D. K. Bo¨hme,   J. M. Goodings,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1966)
卷期: Volume 37, issue 3  

页码: 362-366

 

ISSN:0034-6748

 

年代: 1966

 

DOI:10.1063/1.1720180

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A versatile sampling technique is described which permits a more definitive study of ion extraction and plasma sheath formation in discharge plasmas. The ionic species from the plasma are sampled into a quadrupole mass spectrometer through a metal leak arrangement which itself acts as a probe. This behavior is substantiated by sampling probe characteristics, and charge density and electron temperature determinations for a flowing microwave discharge plasma in nitrogen at low pressure.

 

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