Large‐area diamond deposition in an atmospheric pressure stagnation‐flow reactor
作者:
D. W. Hahn,
C. F. Edwards,
K. F. McCarty,
R. J. Kee,
期刊:
Applied Physics Letters
(AIP Available online 1996)
卷期:
Volume 68,
issue 15
页码: 2158-2160
ISSN:0003-6951
年代: 1996
DOI:10.1063/1.116014
出版商: AIP
数据来源: AIP
摘要:
We present the results of large‐area (20 cm2) diamond deposition from a scaled‐up stagnation‐flow reactor. The reactor uses a unique nozzle geometry that optimizes reagent gas usage. The premixed acetylene–oxygen–hydrogen flames were operated in a highly strained configuration, allowing uniform deposition of diamond with growth rates exceeding 25 &mgr;m/h. Substrate temperature control and flame stability of the chemical vapor deposition reactor are described. Diamond films were deposited on a molybdenum substrate with a surface temperature of approximately 1200 K and C/O ratio of 1.03. Diamond film growth results are presented, and film uniformity is assessed using micro‐Raman spectroscopy. ©1996 American Institute of Physics.
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