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Large‐area diamond deposition in an atmospheric pressure stagnation‐flow reactor

 

作者: D. W. Hahn,   C. F. Edwards,   K. F. McCarty,   R. J. Kee,  

 

期刊: Applied Physics Letters  (AIP Available online 1996)
卷期: Volume 68, issue 15  

页码: 2158-2160

 

ISSN:0003-6951

 

年代: 1996

 

DOI:10.1063/1.116014

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We present the results of large‐area (20 cm2) diamond deposition from a scaled‐up stagnation‐flow reactor. The reactor uses a unique nozzle geometry that optimizes reagent gas usage. The premixed acetylene–oxygen–hydrogen flames were operated in a highly strained configuration, allowing uniform deposition of diamond with growth rates exceeding 25 &mgr;m/h. Substrate temperature control and flame stability of the chemical vapor deposition reactor are described. Diamond films were deposited on a molybdenum substrate with a surface temperature of approximately 1200 K and C/O ratio of 1.03. Diamond film growth results are presented, and film uniformity is assessed using micro‐Raman spectroscopy. ©1996 American Institute of Physics.

 

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