A simple two‐axis ultraprecision actuator
作者:
S. T. Smith,
D. G. Chetwynd,
S. Harb,
期刊:
Review of Scientific Instruments
(AIP Available online 1994)
卷期:
Volume 65,
issue 4
页码: 910-917
ISSN:0034-6748
年代: 1994
DOI:10.1063/1.1144920
出版商: AIP
数据来源: AIP
摘要:
This paper describes a highly controllable, short‐range translation and rotation mechanism. Two solenoid‐magnet force actuators are applied to a simple elastic mechanism resulting in separable translation and rotation drive axes. To provide design rules and assess potential error sources, a theoretical model is discussed and experimentally evaluated. Two such actuators using monolithic aluminum and single crystal silicon flexures have been constructed and measured using stylus‐based, optical and x‐ray interferometric techniques. They are used to demonstrate both longer range motions of 80 &mgr;m and 3.6 mrad and higher precision motions, with resolution of better than 0.6 nrad over ranges of around 10 &mgr;rad across 1 &mgr;m displacement. Performance of these devices was limited primarily by the available drive electronics and measurement techniques, so it is expected that even better precision can be achieved.
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