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Space‐charge effects in Spindt‐type field emission cathodes

 

作者: G. N. A. van Veen,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1994)
卷期: Volume 12, issue 2  

页码: 655-661

 

ISSN:1071-1023

 

年代: 1994

 

DOI:10.1116/1.587407

 

出版商: American Vacuum Society

 

关键词: CATHODES;FIELD EMISSION;SPACE CHARGES;IV CHARACTERISTIC;FOWLER−NORDHEIM THEORY;MATHEMATICAL MODELS;SILICON;SILICON OXIDES;BINARY COMPOUNDS;TITANIUM COMPOUNDS;TUNGSTEN COMPOUNDS;Si;TiW;SiO2

 

数据来源: AIP

 

摘要:

The field emission characteristic of a Spindt‐type cathode, cleaned extensively in a hydrogen atmosphere while emitting, is considered. The maximum emission reached is about 800 μA. At high current levels theI–Vcurve clearly deviates from a Fowler–Nordheim behavior. This can be explained by the occurrence of space charge. Several models are considered to simulate the experimental results. The fit to the data is good except at the highest emission levels. In this region the difference between the measured currents and the simulation results is due to the neglect of the variation of the field on top of the tip in the presence of space charge.

 

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