首页   按字顺浏览 期刊浏览 卷期浏览 Relation between reflection high‐energy electron diffraction specular beam intensity an...
Relation between reflection high‐energy electron diffraction specular beam intensity and the surface atomic structure/surface morphology of GaAs(111)B

 

作者: P. Chen,   K. C. Rajkumar,   A. Madhukar,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1991)
卷期: Volume 9, issue 4  

页码: 2312-2316

 

ISSN:1071-1023

 

年代: 1991

 

DOI:10.1116/1.585739

 

出版商: American Vacuum Society

 

关键词: GALLIUM ARSENIDES;MOLECULAR BEAM EPITAXY;RHEED;SURFACE STRUCTURE

 

数据来源: AIP

 

摘要:

The intensity behavior of the specular beam in reflection high‐energy electron diffraction (RHEED) from GaAs(111)B grown by molecular‐beam epitaxy (MBE) is investigated for various growth and diffraction conditions. The temporal behavior during the initial growth of a buffer layer is examined at a fixed diffraction condition. Intensity increase is observed during and after the initial stages of buffer layer growth and found to saturate after about 80 monolayer growth. Intensity oscillations are seen starting at different moments of initial growth, the earliest observed after only 14 monolayer growth. These results are used to guide and control GaAs(111)B growths with mirrorlike surface morphology.

 

点击下载:  PDF (633KB)



返 回