A new gas purifier for ArF excimer lasers
作者:
S. Ito,
T. Saito,
A. Tada,
期刊:
Review of Scientific Instruments
(AIP Available online 1996)
卷期:
Volume 67,
issue 3
页码: 658-661
ISSN:0034-6748
年代: 1996
DOI:10.1063/1.1146837
出版商: AIP
数据来源: AIP
摘要:
We have developed a new gas purifier for ArF excimer lasers that can remove all the impurities from degraded ArF excimer laser gas. We found that cooled activated charcoal at temperatures below −50 °C effectively removes CF4, which is the preponderant impurity generated in ArF excimer laser gas mixtures. We also demonstrated that the new gas purifier can regenerate the ArF excimer laser gas up to its initial purity level after about 1×109shots of operation. ©1996 American Institute of Physics.
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