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Kinetic energy influence of hyperthermal dual ion beams on bonding and optical properties of carbon nitride films

 

作者: N. Tsubouchi,   Y. Horino,   B. Enders,   A. Chayahara,   A. Kinomura,   K. Fujii,  

 

期刊: Applied Physics Letters  （AIP Available online 1998）
卷期: Volume 72, issue 12  

页码: 1412-1414

 

ISSN:0003-6951

 

年代: 1998

 

DOI:10.1063/1.120580

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Carbon nitride films were produced by simultaneous irradiation of well-defined hyperthermal (50–400 eV), isotopically mass-separated12C2−and14N+ions with various kinetic energy combinations. It was found that the intensity of CN-triple bonds normalized by the amount of nitrogen atoms in the films and the complex refraction index(n,k)are correlated with the energy combination of12C2−and14N+ions. ©1998 American Institute of Physics.

 

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