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High‐resolution temperature measurement of void dynamics induced by electromigration in aluminum metallization

 

作者: Seiichi Kondo,   Kenji Hinode,  

 

期刊: Applied Physics Letters  (AIP Available online 1995)
卷期: Volume 67, issue 11  

页码: 1606-1608

 

ISSN:0003-6951

 

年代: 1995

 

DOI:10.1063/1.114954

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The local temperature of aluminum metallization is measured directly during electromigration. High resolution thermography is used to detect void dynamics induced by a dc current. In the vicinity of the growing area, infrared radiation pulses less than 0.5 s wide are observed concomitant with resistance pulses. Their amplitudes are found to correspond to a temperature increase of more than 200 °C, which locally exceeds the melting point of aluminum metallization. These pulses occur as a consequence of void movement. Healing of voids is discussed along with the results. ©1995 American Institute of Physics.

 

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