High‐resolution temperature measurement of void dynamics induced by electromigration in aluminum metallization
作者:
Seiichi Kondo,
Kenji Hinode,
期刊:
Applied Physics Letters
(AIP Available online 1995)
卷期:
Volume 67,
issue 11
页码: 1606-1608
ISSN:0003-6951
年代: 1995
DOI:10.1063/1.114954
出版商: AIP
数据来源: AIP
摘要:
The local temperature of aluminum metallization is measured directly during electromigration. High resolution thermography is used to detect void dynamics induced by a dc current. In the vicinity of the growing area, infrared radiation pulses less than 0.5 s wide are observed concomitant with resistance pulses. Their amplitudes are found to correspond to a temperature increase of more than 200 °C, which locally exceeds the melting point of aluminum metallization. These pulses occur as a consequence of void movement. Healing of voids is discussed along with the results. ©1995 American Institute of Physics.
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