A new electrode material made of nickel alloy has been developed that can be used in place of platinum electrodes, which have commonly been utilized in conjunction with PbTiO3and Pb(Zr, Ti)O3thin films. This alloy electrode is composed of nickel, chromium, iron and aluminium. When heated in an oxidation atmosphere, an alumina film layer is generated on the surface of the alloy that prevents the electrode from oxidizing and reacting with PbO. The remanent polarization of the PbTiO3film on the alloy electrode oriented in the (111) direction was 25 μC/cm2, a value which is approximately equal to that of ceramics. The breakdown strength of the film reached the relatively large value of 190 kV/cm at room temperature. In addition, the as-grown film was already polarized with a degree of polarization estimated to be half that of fully polarized bulk ceramics.