The ionic component in the sputtering of metals
作者:
V.I. Veksler,
期刊:
Radiation Effects
(Taylor Available online 1980)
卷期:
Volume 51,
issue 3-4
页码: 129-170
ISSN:0033-7579
年代: 1980
DOI:10.1080/00337578008209996
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
The article gives a systematic account of the results of experimental and theoretical studies of ion components produced in the sputtering of pure metals. Experimental dependences of the characteristics of this phenomenon on a number of parameters are analyzed on the basis of criteria proposed for the purity of the experimental condition and, in particular, for the chemical cleanness. Existing theories of the phenomenon are classified, discussed and critically analyzed. Special attention is paid to the experimental discrimination of specific theoretical models.
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