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The ionic component in the sputtering of metals

 

作者: V.I. Veksler,  

 

期刊: Radiation Effects  (Taylor Available online 1980)
卷期: Volume 51, issue 3-4  

页码: 129-170

 

ISSN:0033-7579

 

年代: 1980

 

DOI:10.1080/00337578008209996

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

The article gives a systematic account of the results of experimental and theoretical studies of ion components produced in the sputtering of pure metals. Experimental dependences of the characteristics of this phenomenon on a number of parameters are analyzed on the basis of criteria proposed for the purity of the experimental condition and, in particular, for the chemical cleanness. Existing theories of the phenomenon are classified, discussed and critically analyzed. Special attention is paid to the experimental discrimination of specific theoretical models.

 

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