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Diamond force microscope tips fabricated by chemical vapor deposition

 

作者: G. J. Germann,   G. M. McClelland,   Y. Mitsuda,   M. Buck,   H. Seki,  

 

期刊: Review of Scientific Instruments  （AIP Available online 1992）
卷期: Volume 63, issue 9  

页码: 4053-4055

 

ISSN:0034-6748

 

年代: 1992

 

DOI:10.1063/1.1143265

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A chemical vapor deposition method is described for fabricating force microscope cantilevers with single‐crystal diamond tips. The &bartil;1‐&mgr;m‐diam diamond tips have corner radii of 30 nm, and have been used to study diamond–diamond friction on well‐characterized surfaces in UHV. The tip size and orientation can be determined by electron microscopy without altering the surface atomic structure.

 

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