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Application of scanning probe methods for electronic and magnetic device fabrication, characterization, and testing

 

作者: A. Born,   C. Hahn,   M. Löhndorf,   A. Wadas,   Ch. Witt,   R. Wiesendanger,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1996)
卷期: Volume 14, issue 6  

页码: 3625-3631

 

ISSN:1071-1023

 

年代: 1996

 

DOI:10.1116/1.588738

 

出版商: American Vacuum Society

 

数据来源: AIP

 

摘要:

Selected examples of the application of scanning probe methods for the fabrication, characterization, and testing of electronic and magnetic devices are presented. In particular, promising combinations of conventional photolithography or e‐beam lithography with scanning probe methods are described. The combination of atomic‐scale self‐organization processes with scanning probe microscopy and manipulation experiments possibly can lead to a novel class of atomic‐scale devices which could be fabricated on a reasonable time scale.

 

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