Application of scanning probe methods for electronic and magnetic device fabrication, characterization, and testing
作者:
A. Born,
C. Hahn,
M. Löhndorf,
A. Wadas,
Ch. Witt,
R. Wiesendanger,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1996)
卷期:
Volume 14,
issue 6
页码: 3625-3631
ISSN:1071-1023
年代: 1996
DOI:10.1116/1.588738
出版商: American Vacuum Society
数据来源: AIP
摘要:
Selected examples of the application of scanning probe methods for the fabrication, characterization, and testing of electronic and magnetic devices are presented. In particular, promising combinations of conventional photolithography or e‐beam lithography with scanning probe methods are described. The combination of atomic‐scale self‐organization processes with scanning probe microscopy and manipulation experiments possibly can lead to a novel class of atomic‐scale devices which could be fabricated on a reasonable time scale.
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