AbstractAn energy straggling distribution is incorporated in the Monte‐Carlo simulation of keV‐electron scattering in solids. This distribution is obtained by modifying the original Blunck and Leisegang distribution based on the Landau theory. The average energy loss of the distribution is adjusted to fit the stopping power of the Rao Sahib and Wittry equation (the modified Bethe equation). Since an electron trajectory is simulated by a stepwise fashion, the energy straggling of an electron even in a bulk specimen can be calculated. By comparing with an experimental energy distribution of transmitted electrons from a thin film, the validity of the present model is discussed. The electron path length distribution in a bulk specimen due to the energy straggling is also discus