The use of moiré patterns to determine the source and degree of adistortion in scanning electron microscopes
作者:
S. A. Bradley,
P. N. Thielen,
J. E. Hilliard,
期刊:
Journal of Microscopy
(WILEY Available online 1975)
卷期:
Volume 103,
issue 1
页码: 25-31
ISSN:0022-2720
年代: 1975
DOI:10.1111/j.1365-2818.1975.tb04534.x
出版商: Blackwell Publishing Ltd
数据来源: WILEY
摘要:
SUMMARYScanning electron microscope images are subject to an appreciable amount of non‐linear distortion which must be allowed for when quantitative analyses are made. A method is described for measuring the distortion by the use of moiré patterns. These greatly magnify any non‐linearities and it is possible to measure distortions as small as 0ṁ1%. In addition, the use of moiré patterns permits a separation of the distortion produced in the cathode‐ray display tube from that occurring in the microsco
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