An alternative method for the dechannelling correction in channelling-backscattering experiments
作者:
NP Tognetti,
期刊:
Radiation Effects
(Taylor Available online 1981)
卷期:
Volume 58,
issue 5
页码: 151-156
ISSN:0033-7579
年代: 1981
DOI:10.1080/01422448108229079
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
An alternative procedure to evaluate the dechannelling correction for the extraction of disorder depths distributions, particularly for high levels of disorder, in channelling-backscattering studies is described. It involves the use of experimentally determined values of dechannelling and was used for the extraction of damage distributions in a study of disorder generated by 40 keV N+, P+, As+and Bi+and 20-200 keV Sb+bombardment of (100) GaAs at 40°K. As a result the method appears applicable at least when thermal annealing of disorder is absent. A comparison with various models of small angle scattering is also made.
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