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Atomistic study of nickel silicide structures on Si(100) by tunneling microscopy

 

作者: Izumi Ono,   Masamichi Yoshimura,   Kazuyuki Ueda,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1998)
卷期: Volume 16, issue 6  

页码: 2947-2951

 

ISSN:1071-1023

 

年代: 1998

 

DOI:10.1116/1.590324

 

出版商: American Vacuum Society

 

关键词: NiSi2

 

数据来源: AIP

 

摘要:

Surface structures of Ni-deposited Si(100) have been investigated using scanning tunneling microscopy (STM). After heating at 670 °C,NiSi2islands consisting of patch features grow on the(2×n)substrate. We have proposed a new structure model forNiSi2island by taking account of the correlation of heights and lateral positions between top-layer atoms in theNiSi2and Si dimers in the substrate. In the model, the top-layer atoms, with a nearest neighbor distance of 0.38 nm, are located at bridge sites on the Ni layer ofNiSi2.Patch features consist of two equivalent anti-phase sites shifted by half the unit length of1×1along both [011] and [01̄1]directions. In addition, it is found in the empty-state STM images that the center atoms make pairs two by two.

 

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