Atomistic study of nickel silicide structures on Si(100) by tunneling microscopy
作者:
Izumi Ono,
Masamichi Yoshimura,
Kazuyuki Ueda,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1998)
卷期:
Volume 16,
issue 6
页码: 2947-2951
ISSN:1071-1023
年代: 1998
DOI:10.1116/1.590324
出版商: American Vacuum Society
关键词: NiSi2
数据来源: AIP
摘要:
Surface structures of Ni-deposited Si(100) have been investigated using scanning tunneling microscopy (STM). After heating at 670 °C,NiSi2islands consisting of patch features grow on the(2×n)substrate. We have proposed a new structure model forNiSi2island by taking account of the correlation of heights and lateral positions between top-layer atoms in theNiSi2and Si dimers in the substrate. In the model, the top-layer atoms, with a nearest neighbor distance of 0.38 nm, are located at bridge sites on the Ni layer ofNiSi2.Patch features consist of two equivalent anti-phase sites shifted by half the unit length of1×1along both [011] and [01̄1]directions. In addition, it is found in the empty-state STM images that the center atoms make pairs two by two.
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