Observation of contact holes by atomic force microscopy with a ZnO whisker tip
作者:
Hiroyuki Kado,
Shin‐ichi Yamamoto,
Kazuo Yokoyama,
Takao Tohda,
Yukihiro Umetani,
期刊:
Journal of Applied Physics
(AIP Available online 1993)
卷期:
Volume 74,
issue 7
页码: 4354-4356
ISSN:0021-8979
年代: 1993
DOI:10.1063/1.355313
出版商: AIP
数据来源: AIP
摘要:
We have developed a new precise imaging technique for atomic force microscopy (AFM) and observed complicated surface structures of integrated circuit (IC) devices by this technique. This technique consists of a hopping mode operation and use of a zinc oxide whisker as a probing tip with high aspect ratio. In this operation, topographic data of the surface structures are obtained under a constant repulsive force at each measuring point, and after each measurement the probing tip is withdrawn from the surface and moved to the next measuring point. The contact holes with a diameter of ∼1 &mgr;m and a depth of 1.5 &mgr;m fabricated on IC devices have been successfully imaged in this AFM imaging technique.
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