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Stress in metal lines under passivation; comparison of experiment with finite element calculations

 

作者: Barbara Greenebaum,   Anne I. Sauter,   Paul A. Flinn,   William D. Nix,  

 

期刊: Applied Physics Letters  （AIP Available online 1991）
卷期: Volume 58, issue 17  

页码: 1845-1847

 

ISSN:0003-6951

 

年代: 1991

 

DOI:10.1063/1.105075

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The elastic strain in Al‐0.5% Cu metal lines under silicon nitride passivation has been determined by x‐ray diffraction. The experimental stress tensor calculated from these strain values is in excellent agreement with the results of a finite element model calculation. Theintrinsicstress in the dielectric plays no role in influencing the stress in the metal; only thermal stress effects are important.

 

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