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A novel design for a small retractable cylindrical mirror analyzer

 

作者: D. N. McIlroy,   P. A. Dowben,   A. Knop,   E. Rühl,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  （AIP Available online 1995）
卷期: Volume 13, issue 5  

页码: 2142-2144

 

ISSN:1071-1023

 

年代: 1995

 

DOI:10.1116/1.588092

 

出版商: American Vacuum Society

 

关键词: ARGON;ATOMIC BEAMS;AUGER EFFECT;CYLINDRICAL CONFIGURATION;DESIGN;ELECTRON BEAMS;ELECTROSTATIC ANALYZERS;ELECTROSTATIC MIRRORS;ENERGY SPECTRA;NICKEL

 

数据来源: AIP

 

摘要:

In this paper we will review the performance of a ‘‘miniature’’ single pass cylindrical mirror analyzer (CMA) which we have used successfully in a variety of experiments. The underlying premise behind this CMA design was to minimize spatial requirements while maintaining an acceptable level of instrumental resolution. While we are presenting the results of a single pass cylindrical mirror analyzer, improvements on the present design, such as going to a double pass design, will undoubtedly improve the instrumental resolution.

 

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