New method of measuring vibration amplitudes of quartz crystals
作者:
L. Wimmer,
S. Hertl,
J. Hemetsberger,
E. Benes,
期刊:
Review of Scientific Instruments
(AIP Available online 1984)
卷期:
Volume 55,
issue 4
页码: 605-609
ISSN:0034-6748
年代: 1984
DOI:10.1063/1.1137765
出版商: AIP
数据来源: AIP
摘要:
A new method is presented to measure in‐plane vibration amplitudes of the order of some 10 nm. The measurement system utilizes the speckle effect and consists of only a few mechanical components. The evaluation is done by a microcomputer. The whole system is insensitive to environmental noise. The method has been applied to investigate the amplitude distribution of plano‐convex AT‐cut quartz crystals as they are commonly used in thin‐film thickness monitors.
点击下载:
PDF
(350KB)
返 回