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Convergent-beam electron diffraction study of strain modulation in GaAs/InGaAs superlattices grown by metal-organic chemical vapour deposition

 

作者: K.K. Fung,   P.K. York,   G.E. Fernandez,   J.A. Eades,   J.J. Coleman,  

 

期刊: Philosophical Magazine Letters  (Taylor Available online 1988)
卷期: Volume 57, issue 4  

页码: 221-227

 

ISSN:0950-0839

 

年代: 1988

 

DOI:10.1080/09500838808214711

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

Convergent-beam electron diffraction has been used to study strain modulation in GaAs/InGaAs superlattices (6% In and 2% In) in plan-view. Reflections from planes inclined to the interface of the superlattice are split with sidebands, the angular separation of which is related to the modulation periodicity. It is inferred from higher-order Laue zone lines that inclined planes on opposite sides of an interface in GaAs and InGaAs layers are rotated towards and away from the interface as a result of distortion due to coherent matching and local relaxation in regions where the GaAs substrate and buffer layer have been ion-milled away.

 

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