Diamond synthesis by microwave plasma chemical vapor deposition using graphite as the carbon source
作者:
M. C. Salvadori,
J. W. Ager,
I. G. Brown,
K. M. Krishnan,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 59,
issue 19
页码: 2386-2388
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.106024
出版商: AIP
数据来源: AIP
摘要:
We report on the growth of high‐quality diamond using a microwave plasma chemical vapor deposition (CVD) system in which the feed gas contains no hydrocarbons, but instead the source of carbon is a graphite piece which resides within the plasma volume. Results of experiments using this technique by itself and in combination with the normal methane feed gas method are described. The samples were analyzed by Raman spectroscopy and scanning electron microscopy. Diamond grown in this way was found to be particularly pure and of high crystallinity.
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