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Growth interface breakdown during laser recrystallization from the melt

 

作者: A.G. Cullis,   D. T. J. Hurle,   H. C. Webber,   N. G. Chew,   J. M. Poate,   P. Baeri,   G. Foti,  

 

期刊: Applied Physics Letters  (AIP Available online 1981)
卷期: Volume 38, issue 8  

页码: 642-644

 

ISSN:0003-6951

 

年代: 1981

 

DOI:10.1063/1.92470

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Morphological instability occurring during high‐velocity Si crystal growth from an impurity containing melt is examined in detail. The experimental conditions are achieved by annealing an ion‐implanted Si layer with pulsed laser radiation. Computer modeling is employed to understand the heat flow and impurity diffusion behavior that occurs. The stability and size of impurity segregation cells observed to occur under particular conditions are related to the predictions of morphological stability theory.

 

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