Discharge impedance variations in large area radio frequency excitedCO2lasers
作者:
A. Lapucci,
F. Rossetti,
S. Mascalchi,
R. Ringressi,
期刊:
Applied Physics Letters
(AIP Available online 1997)
卷期:
Volume 71,
issue 14
页码: 1933-1935
ISSN:0003-6951
年代: 1997
DOI:10.1063/1.119985
出版商: AIP
数据来源: AIP
摘要:
Some results from a systematic study on the impedance matching conditions and on the longitudinal power distributions in planar rf discharges forCO2lasers, are given. They show that both plasma impedance and voltage distribution are different in cw and pulsed discharge modes revealing the importance of parameters such as the interelectrode temperature distribution and the local gas density and composition. These parameters have to be taken into account when designing matching networks and voltage smoothing schemes. ©1997 American Institute of Physics.
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