Diagnostics of high‐frequency discharges in CH4/H2by time‐ and space‐resolved optical emission spectroscopy
作者:
Terukazu Kokubo,
Fumiyoshi Tochikubo,
Toshiaki Makabe,
期刊:
Applied Physics Letters
(AIP Available online 1990)
卷期:
Volume 56,
issue 9
页码: 818-820
ISSN:0003-6951
年代: 1990
DOI:10.1063/1.103320
出版商: AIP
数据来源: AIP
摘要:
The diagnostic technique of the rf glow discharge at 13.56 MHz is developed by using the spatiotemporally resolved optical emission spectroscopy. New experimental evidence that the temporal excitation rate at the sheath peaks in phase with the maximum of the total current is obtained in a parallel‐plate geometry at 13.56 MHz in CH4(10%)/H2under a typical condition of the plasma chemical vapor deposition of amorphous carbon film at room temperature.
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