Near‐Field Scanning Microwave Microscope Using a Dielectric Resonator
作者:
Jooyoung Kim,
Hyun Kim,
Myungsik Kim,
Barry Friedman,
Kiejin Lee,
期刊:
AIP Conference Proceedings
(AIP Available online 1903)
卷期:
Volume 657,
issue 1
页码: 456-461
ISSN:0094-243X
年代: 1903
DOI:10.1063/1.1570171
出版商: AIP
数据来源: AIP
摘要:
We describe a near‐field scanning microwave microscope which uses a high‐quality dielectric resonator with a tunable screw. The operating frequency isf= 4.5 GHz. The probe tip is mounted in a cylindrical resonant cavity coupled to a dielectric resonator. By tuning the tunable screw coming through the top cover, we could improve sensitivity, signal‐to‐noise ratio, and spatial resolution to better than 1.5 &mgr;m. To demonstrate the ability of local microwave characterization, the surface resistance of metallic thin films has been mapped. © 2003 American Institute of Physics
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