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Near‐Field Scanning Microwave Microscope Using a Dielectric Resonator

 

作者: Jooyoung Kim,   Hyun Kim,   Myungsik Kim,   Barry Friedman,   Kiejin Lee,  

 

期刊: AIP Conference Proceedings  (AIP Available online 1903)
卷期: Volume 657, issue 1  

页码: 456-461

 

ISSN:0094-243X

 

年代: 1903

 

DOI:10.1063/1.1570171

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We describe a near‐field scanning microwave microscope which uses a high‐quality dielectric resonator with a tunable screw. The operating frequency isf= 4.5 GHz. The probe tip is mounted in a cylindrical resonant cavity coupled to a dielectric resonator. By tuning the tunable screw coming through the top cover, we could improve sensitivity, signal‐to‐noise ratio, and spatial resolution to better than 1.5 &mgr;m. To demonstrate the ability of local microwave characterization, the surface resistance of metallic thin films has been mapped. © 2003 American Institute of Physics

 

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