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Swept Frequency Eddy‐Current Device to Measure Overlay Thickness

 

作者: Eugene A. Hanysz,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1958)
卷期: Volume 29, issue 5  

页码: 411-415

 

ISSN:0034-6748

 

年代: 1958

 

DOI:10.1063/1.1716210

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A new instrument is described which enables nondestructive measurements to be made of film and overlay thicknesses. It utilizes the change in electrical impedance of a composite sample resulting from differences in the thickness of the material being measured to cut off a swept‐frequency oscillator at a frequency determined by that thickness. Operating frequencies from 200 kc to 20 Mc have been used with frequency‐sweep widths, or deviations, up to 10% to measure overlay thicknesses ranging from 0.00005 to 0.007 in. on composite samples in which the conductivity‐to‐permeability ratio of the base and overlay differ by at least a factor of two. Equations are developed to illustrate the conditions for which a reactance‐tube oscillator is employed in a unique manner to make the measurement automatic.

 

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